Reference number
ISO 29301:2023
International Standard
ISO 29301:2023
Microbeam analysis — Analytical electron microscopy — Methods for calibrating image magnification by using reference materials with periodic structures
Edition 3
2023-10
Read sample
ISO 29301:2023
86942
Published (Edition 3, 2023)

ISO 29301:2023

ISO 29301:2023
86942
Language
Format
CHF 173
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Abstract

This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon.

This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar.

This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).

General information

  •  : Published
     : 2023-10
    : International Standard published [60.60]
  •  : 3
     : 44
  • ISO/TC 202/SC 3
    37.020 
  • RSS updates

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