Technical Specification
ISO/TS 25138:2025
Surface chemical analysis — Analysis of metal oxide films by glow discharge optical emission spectrometry
Reference number
ISO/TS 25138:2025
Edition 3
2025-02
© ISO 2025
Technical Specification
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Published (Edition 3, 2025)

ISO/TS 25138:2025

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CHF 177
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Abstract

This document specifies a glow discharge optical emission spectrometric method for the determination of the thickness, mass per unit area and chemical composition of metal oxide films.

This method is applicable to oxide films 5 nm to 10 000 nm thick on metals. The metallic elements of the oxide can include one or more from Fe, Cr, Ni, Cu, Ti, Si, Mo, Zn, Mg, Mn, Zr and Al. Other elements that can be determined by the method are O, C, N, H, P and S.

General information

  • Status
     : Published
    Publication date
     : 2025-02
    Stage
    : International Standard published [60.60]
  • Edition
     : 3
    Number of pages
     : 39
  • Technical Committee :
    ISO/TC 201/SC 8
    ICS :
    71.040.40 
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