Abstract
This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.
General information
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Status: PublishedPublication date: 2024-02Stage: International Standard published [60.60]
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Edition: 3Number of pages: 22
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Technical Committee :ISO/TC 201/SC 7ICS :71.040.40
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Life cycle
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Previously
WithdrawnISO 18118:2015
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Now
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