ISO 14644-2:2015

Published (Edition 2, 2015)

This publication was last reviewed and confirmed in 2021. Therefore this version remains current.

ISO 14644-2:2015

CHF 96

Convert Swiss francs (CHF) to your currency

Abstract

ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.

ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.

General information

Status
: Published

Publication date
: 2015-12

Stage
: International Standard confirmed [90.93]
Edition
: 2

Number of pages
: 14
Technical Committee :
ISO/TC 209

ICS :
13.040.35
RSS updates