ISO 14606:2022

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Publicado (Edición 3, 2022)

ISO 14606:2022

CHF 96

Convertir Franco suizo (CHF) a tu moneda

Resumen

This document gives guidance and requirements on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials, in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry.

This document is not intended to cover the use of special multilayered systems such as delta doped layers.

Informaciones generales

Estado
: Publicado

Fecha de publicación
: 2022-11

Etapa
: Norma Internacional publicada [60.60]
Edición
: 3

Número de páginas
: 17
Comité Técnico :
ISO/TC 201/SC 4

ICS :
71.040.40
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