Reference number
ISO 14644-2:2015
ISO 14644-2:2015
© ISO 2024
International Standard
ISO 14644-2:2015
Cleanrooms and associated controlled environments — Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
Edition 2
2015-12
2015-12
ISO 14644-2:2015
53393
Publicado
(Edición 2, 2015)
Esta publicación se revisó y confirmó por última vez en 2021.
Por lo tanto, esta versión es la actual.
Resumen
ISO 14644-2:2015 specifies minimum requirements for a monitoring plan for cleanroom or clean zone performance related to air cleanliness by particle concentration, based upon parameters that measure or affect airborne particle concentration.
ISO 14644-2:2015 does not address condition monitoring of aspects such as vibration or general maintenance of the engineering systems. It does not provide for monitoring of particle populations that are outside the specified lower threshold particle-size range, 0,1 µm to 5 µm. Concentrations of ultrafine particles (particles smaller than 0,1µm) will be addressed in a separate standard.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2015-12Etapa: Norma Internacional confirmada [90.93]
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Edición: 2Número de páginas: 14
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Comité Técnico :ISO/TC 209ICS :13.040.35
- RSS actualizaciones
Ciclo de vida
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Anteriormente
RetiradaISO 14644-2:2000
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Ahora
