Reference number
ISO 16700:2004
ISO 16700:2004
Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
Edition 1
2004-03
Retirada
ISO 16700:2004
30420
Retirada (Edición 1, 2004)

Resumen

ISO 16700:2004 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.

Informaciones generales

  •  : Retirada
     : 2004-03
    : Retirada de la Norma Internacional [95.99]
  •  : 1
     : 16
  • ISO/TC 202/SC 4
    37.020 
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